A Study on the Effect of Hydrogen Gas Explosion in a Cylinder Cabinet for Semiconductors on the Protective Wall

In the semiconductor industry, hydrogen is used with many other hazardous and dangerous substances flammable, toxic, corrosive properties. order to safely handle them, convenient-to-use gas cabinets are often required. As known well, highly flammable explosive, risk analysis needs use in cabinets. this study, overpressure impact according various cabinet conditions were measured when leaks cabinet, effect of on protective wall was simulated. For research, a demonstration experiment conducted by custom manufacturing cylinder identical standard field, protection performance performed reverse-engineering it through 3D scanning. result experiment, maximum pressure at time explosion 0.3 bar. After calculating detonation propagation profile using TNT equivalence method, confirmed AUTODYN. The stress concrete reinforcing bar due calculated be 30.211 MPa 112.88 MPa, respectively, which do not exceed tensile strength yield This expected great help development industry suggesting rationale for mitigating firewall changing layout.